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Air-Cushion Applications
 
Product Application
Characteristics
Density
(g/cm3)
Flexural
strength
(N/mm2)
Air flow rates at pressure difference of 1 bar / 10 mm METAPOR slab (per cm2 per minute in litres)
BF 100 AL Air-cushion transport in paper industry, plastics and metal handling
1.8 56 1.4
CE 100
WHITE
Air-cushion transport in semiconductor industry, glass substrate handling 1.7 28,5 1.4
 

Case Study at BASLER AG, Ahrensburg, Germany – glass substrate transport

METAPOR® CE 100 WHITE hovercraft conveyor system supplied by our METAPOR® distributor Horst Witte Gerätebau, Bleckede, Germany
 
basler case study image 1
METAPOR® CE 100 WHITE
 
Highly sensitive products like glass substrate for flat displays need to be handled extremely carefully or even better not manually handled at all. The Basler company took this to heart: Their quality control specialists offer equipment with a hovercraft transport conveyor belt system, which comprises of Witte modules. The original application for these modules was vacuum clamping.

One of the few specialists for such systems is Basler AG in Ahrensburg near Hamburg. They develop and manufacture vision technology - technology of artificial viewing - and market it worldwide. Depending on the application Basler specialists adapt their quality control systems and components, to optimise effectivity and economy of automatic manufacturing. Basler AG customers stem from CD/DVD, rubber, flat screen and foil industries. Next to system solutions Basler offers components and supplies for the machine vision industry with special cameras and lamps

Basler manufacturing systems for displays without automatic optical inspection systems, which are integrated in the manufacturing process, are unthinkable. They have to recognise faulty substrate early and enable exclusion before following processes take place. Permanent inspection also records changes in manufacturing process, which can be reacted to immediately (yield management).

The result: optimised output, reduced manufacturing cost and faultless manufacture.

Conventionally, substrates are transported on rollers or belts. This type of handling is still warranted for lower quality requirements.
However on an absolutely high-tech level contact-free transport is required. Substrates hover through the manufacturing process on an air cushion so to speak. The idea to use so-called air cushions for transport is not new. This technology has been used for a long time in the semi conductor industry to handle wafers.

Usually the modules for making the air cushions are in ceramic foam, thereby very expensive and because of their hardness heavy and complicated to machine. Clamping plates manufactured out of porous aluminium-hydroxide ( METAPOR CE-100 WHITE) offer the advantage that they can be easily machined compared to ceramics. The material is ideal for us because it is more or less self-cleaning. When  METAPOR clamping chucks come straight off the machine, it has pressured air put through it and after 30 seconds all loose particles are removed. During use with cleaned, compressed air the plate is even suitable for clean room conditions.
 
basler case study image 2
METAPOR® CE 100 WHITE
 
After extremely successful tests using Witte products Basler had the process of transporting substrates on air cushions during optical inspection with line cameras patented and has applied it already several times. Apart from it being operator friendly the Ahrensburg vision specialists also profit from the fact that they can define the required connections or holes themselves.

Witte supplies individual modules suitably pre-machined and Basler assembles them onto sub-structures. It sounds easy. However the total alignment of the modules requires a great deal of  know-how. Transport surfaces must be set absolutely plane parallel to transport the glass substrates of approx 0,5mm thickness and an edge length of one meter (increasing constantly) from machining process to machining process. Also optical inspection systems integrated in intervals require stable accurate handling of the substrates.

The substrate “swims” on an air cushion of approx. 1 millimetre on the edge of the transport belt, which is powered along at a speed of 6-12 m/min. The substrates are only touched on the edges foreseen for this purpose. The reverse side is not touched at all and all marks are avoided. Further the air cushion conveyor comprises of a lower number of moving components than conventional roller or conveyor belts, which makes for easier service and maintenance.
 
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