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METAPOR® – Products For Vacuum Clamping Systems
In the vacuum clamping industry, drilling and channeling of vacuum plates is widely used. This technology has been proven for years, however, the process is quite time consuming and expensive. Applications with porous sintered materials are limited due to high cost and complex machining requirements.
 
clamping device METAPOR® offers new possibilities as a result of its easy machining properties. METAPOR® vacuum clamping devices permits holding of extremely sensitive parts without deformation, since there are no drill holes or channels. Static jam while ejecting can be eliminated using compressed air, which creates a smooth and even air cushion.
METAPOR® CE 100 White
chuck with integrated temperature sensor for use in measuring device
 
 

Different METAPOR® Products are available for Vacuum Clamping Devices
  • METAPOR® BF100 AL is advantageous for vacuum clamping devices for fixation of sensitive materials like very thin films (0,01 mm) or for engraving flat objects.

  • METAPOR® CE 100 White is an extremely fine porous material with a white non-reflexive surface and is easily workable. It has proven to be very useful in silicon-wafer production, also due to its strong surface hardness and precision milling capability. Flatness of vauum chuck surfaces less than 5 micron. Clean room surrounding (class 10) approved.

  • Vacuum clamping devices made from METAPOR® MC 100 AL are used for complex 3D-shapes and for complete surface coverage, to clamp parts and films without any deformation.
Metapor CE 100 white
  METAPOR® CE 100 White
Semiconductor chuck
 

Advantages
  • Even vacuum on the entire surface
  • Deformation-free fixing due to micro-porous surface
  • Economical construction; no drill-holes needed whatsoever
metapor CE 100 white
  METAPOR® CE 100 White
chuck for wafer-plates
 

Applications
  • Plane clamping
          worktables, printing tables, measuring tables, clamping inserts within compression moulds

  • Profile clamping
          vacuum supported form grippers for complex tools, trimming of thermoformed parts
Metapor BF 100 AL
  METAPOR® BF 100 AL
clamping device for cheque cards made by WITTE
 

Technical Data
Product Application
Characteristics
Density
(g/cm3)
Flexural
strength
(N/mm2)
Air flow rates at pressure difference of 1 bar / 10 mm METAPOR slab (per cm2 per minute in litres)
BF 100 AL • Plane clamping
• Very sensitive parts and thin films
• Partial coverage of clamping surface possible
1.8 56 1.4
CE 100
WHITE
• Plane clamping
• High surface resistant
• Very sensitive parts and thin films – semiconductor industry
• Partial coverage of clamping surface possible
1.7 28,5 1.4
MC 100 AL • Plane and profile clamping
• Full coverage of clamping surface required
• Maximum airflow
1.7 25 11.5
 

Sketch of a METAPOR® Vacuum Clamping Device
sketch of vacuum clamping device
Based plate with
air distribution channels
METAPOR® - part inserted Gap filled with ARALDIT 2014 -
adhesive, top surface milled
 
METAPOR® is a registered trademark of Portec in Switzerland.
 
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