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METAPOR® offers
new possibilities as a result of its easy machining
properties. METAPOR® vacuum
clamping devices permits holding of extremely sensitive
parts without deformation, since there are no drill
holes or channels. Static jam while ejecting can
be eliminated using compressed air, which creates
a smooth and even air cushion. |
METAPOR® CE 100 White
chuck with integrated temperature sensor for use
in measuring device |
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| Different
METAPOR® Products
are available for
Vacuum Clamping Devices |
- METAPOR® BF100
AL is advantageous for vacuum clamping
devices for fixation of sensitive materials
like very thin films (0,01 mm) or for engraving
flat objects.
- METAPOR® CE
100 White is an extremely fine porous
material with a white non-reflexive surface and is
easily workable. It has proven to be very useful
in silicon-wafer production, also due to its strong
surface hardness and precision milling capability.
Flatness of vauum chuck surfaces less than 5 micron.
Clean room surrounding (class 10) approved.
- Vacuum clamping devices made from METAPOR® MC 100
AL are used for complex 3D-shapes and for complete
surface coverage, to clamp parts and films without
any deformation.
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METAPOR® CE
100 White
Semiconductor chuck |
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| Advantages |
- Even vacuum on the entire surface
- Deformation-free fixing due to micro-porous surface
- Economical construction; no drill-holes needed whatsoever
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METAPOR® CE
100 White
chuck for wafer-plates |
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| Applications |
- Plane
clamping
worktables, printing tables, measuring tables,
clamping inserts within compression moulds
- Profile clamping
vacuum supported form grippers for complex
tools, trimming of thermoformed parts
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METAPOR® BF
100 AL
clamping device for cheque cards made by WITTE
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| Technical
Data |
|
Product |
Application
Characteristics |
Density
(g/cm3) |
Flexural
strength
(N/mm2) |
Air flow rates at pressure
difference of 1 bar / 10 mm METAPOR
slab (per cm2
per minute in litres) |
| BF
100 AL |
Plane
clamping
Very sensitive parts and thin films
Partial coverage of clamping surface
possible |
1.8 |
56 |
1.4 |
CE
100
WHITE |
Plane
clamping
High surface resistant
Very sensitive parts and thin films semiconductor
industry
Partial coverage of clamping surface possible |
1.7 |
28,5 |
1.4 |
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MC 100
AL |
Plane
and profile clamping
Full coverage of clamping surface
required
Maximum airflow |
1.7 |
25 |
11.5 |
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| Sketch
of a METAPOR® Vacuum Clamping Device |
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Based plate with
air distribution channels |
METAPOR® -
part inserted |
Gap filled with ARALDIT 2014 -
adhesive, top
surface milled |
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| METAPOR® is
a registered trademark of Portec in Switzerland. |